A Cyber-Physical System Designed to Implement Data Acquisition for a Sputter Deposition Chamber
- Program: Materials Science and Engineering
- Course: EN.510.434 MSE Senior Design
Project Description:
The Weihs Lab makes extensive use of their sputter deposition chamber. The equipment used by the chamber currently do not have any data acquisition system in place. A cyber-physical system was designed to continually log output data, allow for enhanced programming of the equipment, and automatically report equipment failures.